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Thermo Scientific™ SURF-CAL™ Particle Size Standards

Product Code. 11804892 Shop All Thermo Scientific Products
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Diameter (Metric):
0.047 μm
0.064 μm
0.083 μm
0.092 μm
0.100 μm
0.155 μm
0.202 μm
0.204 μm
0.220 μm
0.304 μm
0.360 μm
0.498 μm
0.802 μm
0.809 μm
1.112 μm
1.59 μm
2.01 μm
3.04 μm
Concentration:
1 x 10¹° particles/mL
3 x 108 particles/mL
Pakningsstørrelse:
50mL
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Artikelnummer. 11804892

Brand: Thermo Scientific™ PD365

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Beskrivelse

Simplify the preparation of calibration wafers with these particle size standards.

Simplify the preparation of calibration wafers with Thermo Scientific™ SURF-CAL™ Particle Size Standards, for calibration and maintenance of Scanning Surface Inspection Systems (SSIS). Available particle sizes correspond to the calibration point sizes required by instrument manufacturers.

Thermo Fisher Scientific™, along with the Semiconductor Industry and SEMI, have established specific particle sizes to be used when calibrating Scanning Surface Inspection Systems. Working with instrument manufacturers, we created the SURF-CAL™ product line to meet SEMI standard guidelines.
  • Available sizes are considered to be critical sizing nodes as defined by the International Technology Roadmap for Semiconductors (ITRS).
  • By depositing SURF-CAL™ NIST™ traceable polystyrene latex spheres (PSL) on specially selected wafers, you can perform periodic calibration checks and compare your scanner with scanners at other locations.
  • You can also assess the performance of your SSIS at critical stages in the manufacturing process.
  • All products are suspended in deionized, filtered water in 50mL bottles at a concentration of 3 × 108 particles per mL.

Note:

Products PD1100 and smaller are also available at 1010 particles per mL for applications using the aid of a Differential Mobility Analyzer (DMA) or other size exclusionary techniques.

TRUSTED_SUSTAINABILITY

Tekniske data

Additive None
Concentration 3 x 108 particles/mL
Content And Storage Unless otherwise stated, refrigerate (2° to 8°C) product when not in use but do not freeze. Store upright and keep bottle tightly sealed. Mix product with gentle inversion by hand or vortex mixer.
Contents Polystyrene microspheres in deionized, filtered water
Description Particles for calibration and maintenance of Scanning Surface Inspection Systems (SSIS)
Color White or Colorless
For Use With (Application) SSIS Calibration and Maintenance
Material Polystyrene
Product Type Size Standard Particles
Includes Certificate of Calibration and Traceability to NIST
Particle Density 1.05g/cm³
Quantity 50 mL
Refractive Index 1.59 at 589nm (25°C)
Size Distribution 0.005µm
Stability Product stable for a minimum of 12 months
Diameter (Metric) 0.360 μm
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